Browsing by author "Green, Martin L."

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Determination of work functions in the Ta1-xAlxNy/HfO2 advanced gate stack using combinatorial methodology

Chang, Kao-Shuo; Green, Martin L.; Hattrick-Simpers, Jason R.; Takeuchi, Ichiro; Suehle, John S.; Celik, Ozgur; De Gendt, Stefan (2008-10)
The nucleation of ALD HfO2 films, and evolution of their morphology, studied by grazing incidence small angle x-ray scattering by synchroton radiation

Green, Martin L.; Li, Xuefa; Wang, Jin; Allen, Andrew J.; Delabie, Annelies; Puurunen, Riikka; Brijs, Bert; Vanhaeren, Danielle (2004)