Browsing by author "Graoui, H."

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Advanced front-end processes for the 45nm CMOS technology node

Collart, E.J.H.; Felch, S.B.; Graoui, H.; Tallavarjula, S.; Lindsay, Richard; Pawlak, Bartek; van den Berg, J.A.; Cowern, N.E.B.; Kirby, K.J. (2004)
Co-implantation with conventional spike anneal solutions for 45 nm ultra-shallow junction formation

Collart, E.H.; Felch, S.B.; Graoui, H.; Kirkwood, D.; Pawlak, Bartek; Absil, Philippe; Severi, Simone; Janssens, Tom; Vandervorst, Wilfried (2005)