Browsing by author "Choi, Suhyeong"

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2D self-aligned via patterning strategy with EUV single exposure in 3nm technology

Choi, Suhyeong; Lee, Jae Uk; Blanco, Victor; Kim, Ryan Ryoung han; Shin, Youngsoo (2017)
Large marginal 2D self-aligned via patterning for sub-5nm technology

Choi, Suhyeong; Lee, Jae Uk; Blanco, Victor; Debacker, Peter; Raghavan, Praveen; Kim, Ryan Ryoung han; Shin, Youngsoo (2017)