Browsing by author "Yan, Pei-Yang"
Now showing items 1-3 of 3
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Impact of EUV mask surface roughness on LER
Vaglio Pret, Alessandro; Gronheid, Roel; Younkin, Todd; Leeson, Michael J.; Yan, Pei-Yang (2012) -
Impact of EUV mask surface roughness on LER
Vaglio Pret, Alessandro; Gronheid, Roel; Younkin, Todd; Leeson, Michael; Yan, Pei-Yang (2012) -
Mask effects on resist variability in extreme ultraviolet lithography
Vaglio Pret, Alessandro; Gronheid, Roel; Engelen, Jan; Yan, Pei-Yang; Leeson, Michael; Younkin, Todd; Garidis, Kostas; Biafore, John (2013)