Browsing by author "Hunsche, Stefan"
Now showing items 1-3 of 3
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A new paradigm for in-line detection and control of patterning defects
Hunsche, Stefan; Jochemsen, Marinus; Jain, Vivek; Zhou, Xinjian; Chen, Frank; Vellanki, Venu; Spence, Chris; Halder, Sandip; Van Den Heuvel, Dieter; Truffert, Vincent (2015) -
Characterization and control of dynamic lens heating effects under high-volume manufacturing conditions
Bekaert, Joost; Van Look, Lieve; Vandenberghe, Geert; Van Adrichem, Paul; Maslow, Mark J.; Gemmink, Jan-Willem; Cao, Hua; Hunsche, Stefan; Neumann, Jens Timo; Wolf, Alexander (2011) -
Process window and defect monitoring using high-throughput e-beam inspection guided by computational hot spot detection
Wang, Fei; Zhang, Pencheng; Fang, Wei; Liu, Kevin; Jau, Jack; Wang, Lester; Wan, Alex; Hunsche, Stefan; Halder, Sandip; Leray, Philippe (2016)