Browsing by author "Vecchio, G."
Now showing items 1-3 of 3
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Influence of metal and SBT dry-etch on FeCAP properties and role of recovery anneals
Goux, Ludovic; Paraschiv, Vasile; Boullart, Werner; Lisoni, Judit; Schwitters, M.; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Caputa, Concetta; Casella, P.; Zambrano, R.; Vecchio, G.; Monchoix, H. (2004) -
Integration of ferroelectric SrBi2Ta2O9-based capacitors in 0.35 μm CMOS technology
Lisoni, Judit; Johnson, Jo; Goux, Ludovic; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Caputa, Concetta; Casella, P.; Zambrano, R.; Vecchio, G.; Monchoix, H.; Van Autryve, Luc; Wouters, Dirk (2004) -
Integration of SrBi2Ta2O9 (SBT) based FRAM capacitors: plasma etch issues and solutions
Paraschiv, Vasile; Boullart, Werner; Vanhaelemeersch, Serge; Lisoni, Judit; Schwitters, Michael; Maes, David; Wouters, Dirk; Casella, P.; Zambrano, R.; Vecchio, G.; Van Autryve, Luc (2004)