Integration of ferroelectric SrBi2Ta2O9-based capacitors in 0.35 μm CMOS technology

Lisoni, Judit; Johnson, Jo; Goux, Ludovic; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Caputa, Concetta; Casella, P.; Zambrano, R.; Vecchio, G.; Monchoix, H.; Van Autryve, Luc; Wouters, Dirk

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Integration of ferroelectric SrBi2Ta2O9-based capacitors in 0.35 μm CMOS technology

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2004

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Physica Status Solidi C

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Integration of ferroelectric SrBi2Ta2O9-based capacitors in 0.35 μm CMOS technology

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