Integration of ferroelectric SrBi2Ta2O9-based capacitors in 0.35 μm CMOS technology

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Authors

Lisoni, Judit; Johnson, Jo; Goux, Ludovic; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Caputa, Concetta; Casella, P.; Zambrano, R.; Vecchio, G.; Monchoix, H.; Van Autryve, Luc; Wouters, Dirk

Issue

S1

Journal

Physica Status Solidi C

Volume

1

Title

Integration of ferroelectric SrBi2Ta2O9-based capacitors in 0.35 μm CMOS technology

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Journal article

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