Publication:
Integration of ferroelectric SrBi2Ta2O9-based capacitors in 0.35 μm CMOS technology
Date
| dc.contributor.author | Lisoni, Judit | |
| dc.contributor.author | Johnson, Jo | |
| dc.contributor.author | Goux, Ludovic | |
| dc.contributor.author | Schwitters, Michael | |
| dc.contributor.author | Paraschiv, Vasile | |
| dc.contributor.author | Maes, David | |
| dc.contributor.author | Haspeslagh, Luc | |
| dc.contributor.author | Caputa, Concetta | |
| dc.contributor.author | Casella, P. | |
| dc.contributor.author | Zambrano, R. | |
| dc.contributor.author | Vecchio, G. | |
| dc.contributor.author | Monchoix, H. | |
| dc.contributor.author | Van Autryve, Luc | |
| dc.contributor.author | Wouters, Dirk | |
| dc.contributor.imecauthor | Goux, Ludovic | |
| dc.contributor.imecauthor | Paraschiv, Vasile | |
| dc.contributor.imecauthor | Haspeslagh, Luc | |
| dc.contributor.imecauthor | Van Autryve, Luc | |
| dc.contributor.orcidimec | Goux, Ludovic::0000-0002-1276-2278 | |
| dc.contributor.orcidimec | Haspeslagh, Luc::0000-0003-3561-3387 | |
| dc.date.accessioned | 2021-10-15T14:30:31Z | |
| dc.date.available | 2021-10-15T14:30:31Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9212 | |
| dc.source.beginpage | S78 | |
| dc.source.endpage | S82 | |
| dc.source.issue | S1 | |
| dc.source.journal | Physica Status Solidi C | |
| dc.source.volume | 1 | |
| dc.title | Integration of ferroelectric SrBi2Ta2O9-based capacitors in 0.35 μm CMOS technology | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |