Integration of ferroelectric SrBi2Ta2O9-based capacitors in 0.35 μm CMOS technology

Lisoni, Judit; Johnson, Jo; Goux, Ludovic; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Caputa, Concetta; Casella, P.; Zambrano, R.; Vecchio, G.; Monchoix, H.; Van Autryve, Luc; Wouters, Dirk

Publication:

Integration of ferroelectric SrBi2Ta2O9-based capacitors in 0.35 μm CMOS technology

Date

2004

Journal article

Simple item page Full metadata Statistics

Author(s)

;

;

;

;

;

;

;

;

;

;

;

;

;

Journal

Physica Status Solidi C

Statistics

1973 since deposited on 2021-10-15

5last month

1last week

Acq. date: 2026-01-26

Integration of ferroelectric SrBi2Ta2O9-based capacitors in 0.35 μm CMOS technology

Date

Author(s)

Journal

Abstract

Description

Statistics

Views

Citations

Statistics

Views

Citations