Publication:
Influence of metal and SBT dry-etch on FeCAP properties and role of recovery anneals
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1933 since deposited on 2021-10-15
1last month
Acq. date: 2026-01-08
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Metrics
Views
1933 since deposited on 2021-10-15
1last month
Acq. date: 2026-01-08
Citations