Publication:

Influence of metal and SBT dry-etch on FeCAP properties and role of recovery anneals

Date

2004
Presentation
Simple item page Full metadata Statistics
 
dc.contributor.authorGoux, Ludovic
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorBoullart, Werner
dc.contributor.authorLisoni, Judit
dc.contributor.authorSchwitters, M.
dc.contributor.authorMaes, David
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorWouters, Dirk
dc.contributor.authorCaputa, Concetta
dc.contributor.authorCasella, P.
dc.contributor.authorZambrano, R.
dc.contributor.authorVecchio, G.
dc.contributor.authorMonchoix, H.
dc.contributor.imecauthorGoux, Ludovic
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.orcidimecGoux, Ludovic::0000-0002-1276-2278
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.date.accessioned2021-10-15T13:38:08Z
dc.date.available2021-10-15T13:38:08Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8975
dc.source.conferenceInternational Symposium on Integrated Ferroelectrics
dc.source.conferencedate5/04/2004
dc.source.conferencelocationGyeongju Korea
dc.title

Influence of metal and SBT dry-etch on FeCAP properties and role of recovery anneals

dc.typeOral presentation
dspace.entity.typePublication
Files
Publication available in collections:
Presentations