Browsing by author "Tung, Maryann C."
Now showing items 1-3 of 3
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Density-balancing mask sssignment for via patterning with directed self-assembly
Tung, Maryann C.; Guo, Daifeng; Karageorgos, Ioannis; Wong, Martin D. F.; Wong, H.-S. Philip (2016-10) -
Design method and algorithms for directed self-assembly aware via layout decomposition in sub-7 nm circuits
Karageorgos, Ioannis; Ryckaert, Julien; Gronheid, Roel; Tung, Maryann C.; Wong, H.-S. Philip; Karageorgos, Evangelos; Croes, Kris; Bekaert, Joost; Vandenberghe, Geert; Stucchi, Michele; Dehaene, Wim (2016-11) -
Templated DSA vias in sub-7 nm circuits: Design strategy and DSA-aware via decomposition
Karageorgos, Ioannis; Ryckaert, Julien; Gronheid, Roel; Tung, Maryann C.; Wong, H.-S. Philip; Karageorgos, Evangelos; Bekaert, Joost; Vandenberghe, Geert; Dehaene, Wim (2016-10)