Density-balancing mask sssignment for via patterning with directed self-assembly

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Authors
Tung, Maryann C.; Guo, Daifeng; Karageorgos, Ioannis; Wong, Martin D. F.; Wong, H.-S. Philip
Conference
2nd International Symposium on DSA
Title
Density-balancing mask sssignment for via patterning with directed self-assembly
Publication type
Meeting abstract
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