Publication:

Templated DSA vias in sub-7 nm circuits: Design strategy and DSA-aware via decomposition

Date

2016-10
Proceedings Paper
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Author(s)

Karageorgos, Ioannis
;
Ryckaert, Julien  
;
Gronheid, Roel  
;
Tung, Maryann C.
;
Wong, H.-S. Philip
;
Karageorgos, Evangelos
;
Bekaert, Joost  
;
Vandenberghe, Geert  
;
Dehaene, Wim  

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1874 since deposited on 2021-10-23
Acq. date: 2026-02-25

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1874 since deposited on 2021-10-23
Acq. date: 2026-02-25

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