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Templated DSA vias in sub-7 nm circuits: Design strategy and DSA-aware via decomposition
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1874 since deposited on 2021-10-23
3last month
Acq. date: 2026-01-07
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Metrics
Views
1874 since deposited on 2021-10-23
3last month
Acq. date: 2026-01-07
Citations