Publication:
Templated DSA vias in sub-7 nm circuits: Design strategy and DSA-aware via decomposition
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1868 since deposited on 2021-10-23
403item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1868 since deposited on 2021-10-23
403item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations