Browsing by author "Masaoka, Toru"
Now showing items 1-5 of 5
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Dissolution of germanium in sulfuric acid based solutions
Gan, Nobuko; Ogawa, Yuichi; Nagai, Tatsuo; Masaoka, Toru; Wostyn, Kurt; Sebaai, Farid; Holsteyns, Frank; Mertens, Paul (2015) -
Effect of dilute hydrogen peroxide in ultrapure water on SiGe epitaxial process
Masaoka, Toru; Gan, Nobuko; Fujimura, Yu; Ogawa, Yuichi; Wostyn, Kurt; Pacco, Antoine; Yoshida, Yukifuni; Holsteyns, Frank (2016) -
Enabling GeH4-HCl in-situ pre-epi clean: impact of water quality on HF last process performance
Wostyn, Kurt; Rondas, Dirk; Loo, Roger; Dhayalan, Sathish Kumar; Hikavyy, Andriy; Elskens, Wim; Vyncke, Alex; Mertens, Paul; Holsteyns, Frank; De Gendt, Stefan; Masaoka, Toru; Yoshida, Yukifumi; Bast, Gerhard; Simpson, Gavin (2015) -
Impact of hydrogen peroxide in ultrapure water
Ogawa, Yuichi; Masaoka, Toru; Gan, Nobuko; Fujimura, Yu; Minato, Yasuharu; Miyazaki, Yoichi; Wostyn, Kurt; Pacco, Antoine; Holsteyns, Frank; Yoshida, Yukifumi (2017) -
Study of cobalt etch control by pH and oxidizer
Ogawa, Yuichi; Gan, Nobuko; Masaoka, Toru; Yoshimura, Minami; Iino, Hideaki; Le, Quoc Toan; Kesters, Els; Akanishi, Yuya; Holsteyns, Frank (2018)