Browsing by author "Granger, Pascal"
Now showing items 1-2 of 2
-
Etching of thermal SiO2 in supercritical CO2
Malhouitre, Stephane; Van Hoeymissen, Jan; Case, Carlye; Granger, Pascal (2007) -
Supercritical CO2 low-k dielectric repair
Malhouitre, Stephane; Van Hoeymissen, Jan; Muscat, Anthony; Granger, Pascal; Mertens, Paul (2005)