Etching of thermal SiO2 in supercritical CO2

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Authors
Malhouitre, Stephane; Van Hoeymissen, Jan; Case, Carlye; Granger, Pascal
Conference
Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10
Title
Etching of thermal SiO2 in supercritical CO2
Publication type
Proceedings paper
Embargo date
9999-12-31
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