Browsing by author "van Dijk, Leon"
Now showing items 1-8 of 8
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Direct correlation between mask registration and on-wafer measurements for individual logic device features
van Haren, Richard J. F.; Steinert, Steffen; Mouraille, Orion; Kasperkiewicz, Ewa; Hermans, Jan; Hasan, Mahmudul; van Dijk, Leon; Beyer, Dirk (2022) -
Etch tool pressure optimization enabling wafer edge overlay control.
Yildirim, Oktay; van Haren, Richard; Mouraille, Orion; van Dijk, Leon; Hermans, Jan; Kumar, Kaushik; Feurprier, Yannick (2020) -
Intra-field etch induced overlay penalties
van Haren, Richard; Yildirim, Oktay; Mouraille, Orion; van Dijk, Leon; Kumar, Kaushik; Feurprier, Yannick; Hermans, Jan (2020) -
Intra-field mask-to-mask overlay, separating the mask writing from the dynamic pellicle contribution
van Haren, Richard; Steinert, Steffen; Mouraille, Orion; D'have, Koen; van Dijk, Leon; Otten, Ronald; Beyer, Dirk (2018) -
Mitigation of the etch-induced intra-field overlay contribution
van Haren, Richard; Yildirim, Oktay; Mouraille, Orion; van Dijk, Leon; Kumar, Kaushik; Feurprier, Yannick; Jehoul, Christiane; Hermans, Jan (2022) -
Off-line mask-to-mask registration characterization
van Haren, Richard; Steinert, Steffen; Roelofs, Christian; Mouraille, Orion; D'have, Koen; van Dijk, Leon; Beyer, Dirk (2017) -
The mask contribution as part of the intra-field on-product overlay performance
Mouraille, Orion; van Haren, Richard; Steinert, Steffen; Hermans, Jan; van Dijk, Leon; Beyer, Dirk; Yildirim, Oktay (2020) -
The mask contribution as part of the intra-field on-product overlay performance
van Haren, Richard; Steinert, Steffen; Mouraille, Orion; Hermans, Jan; van Dijk, Leon; Beyer, Dirk (2020)