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Direct correlation between mask registration and on-wafer measurements for individual logic device features
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Authors
van Haren, Richard J. F.
;
Steinert, Steffen
;
Mouraille, Orion
;
Kasperkiewicz, Ewa
;
Hermans, Jan
;
Hasan, Mahmudul
;
van Dijk, Leon
;
Beyer, Dirk
DOI
10.1117/12.2641618
EISBN
978-1-5106-5642-0
ISSN
0277-786X
Conference
Photomask Technology Conference
Journal
Proceedings of SPIE
Volume
12293
Title
Direct correlation between mask registration and on-wafer measurements for individual logic device features
Publication type
Proceedings paper
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Version
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Date
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3
20.500.12860/41097.3
*
2023-04-28T10:17:58Z
validation by library/open access desk
2
20.500.12860/41097.2
2023-02-16T11:32:22Z
validation by imec author
1
20.500.12860/41097
2023-02-15T03:23:35Z
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