Browsing by author "Steinert, Steffen"
Now showing items 1-9 of 9
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Co-optimizatin of RegC and TWINSCANTM corrections to improve the intra-field on-product overlay performance
Gorhad, Kujan; Sharon, Ofir; Dmitriev, Vladimir; Cohen, Avi; van Haren, Richard; Roelofs, Christian; Cekli, H.E.; Gallagher, Emily; Leray, Philippe; Beyer, Dirk; Trautsch, Thomas; Steinert, Steffen (2016) -
Direct correlation between mask registration and on-wafer measurements for individual logic device features
van Haren, Richard J. F.; Steinert, Steffen; Mouraille, Orion; Kasperkiewicz, Ewa; Hermans, Jan; Hasan, Mahmudul; van Dijk, Leon; Beyer, Dirk (2022) -
Intra-field mask-to-mask overlay, separating the mask writing from the dynamic pellicle contribution
van Haren, Richard; Steinert, Steffen; Mouraille, Orion; D'have, Koen; van Dijk, Leon; Otten, Ronald; Beyer, Dirk (2018) -
Off-line mask-to-mask registration characterization
van Haren, Richard; Steinert, Steffen; Roelofs, Christian; Mouraille, Orion; D'have, Koen; van Dijk, Leon; Beyer, Dirk (2017) -
The impact of the reticle and wafer alignment mark placement accuracy on the intra-field mask-to-mask overlay
van Haren, Richard; Steinert, Steffen; Mouraille, Orion; D'have, Koen; Van Dijk, Leon; Hermans, Jan; Beyer, Dirk (2019) -
The impact of the reticle and wafer alignment mark placement accuracy on the intra-field mask-to-mask overlay
Mouraille, Orion; van Haren, Richard; Steinert, Steffen; D'have, Koen; Van Dijk, Leon; Hermans, Jan; Beyer, Dirk (2019) -
The mask contribution as part of the intra-field on-product overlay performance
Mouraille, Orion; van Haren, Richard; Steinert, Steffen; Hermans, Jan; van Dijk, Leon; Beyer, Dirk; Yildirim, Oktay (2020) -
The mask contribution as part of the intra-field on-product overlay performance
van Haren, Richard; Steinert, Steffen; Mouraille, Orion; Hermans, Jan; van Dijk, Leon; Beyer, Dirk (2020) -
Wafer alignment mark placement accuracy impact on the layer to layer overlay performance
van Haren, Richard; Steinert, Steffen; Mouraille, Orion; D'have, Koen; Van Dijk, Leon; Hermans, Jan; Beyer, Dirk (2019)