Browsing by author "Petersen, D.H."
Now showing items 1-7 of 7
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Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions
Petersen, D.H.; Lin, R.; Hansen, T.M.; Rosseel, Erik; Vandervorst, Wilfried; Markvardsen, C.; Kjaer, D.; Nielsen, P.F. (2008) -
Electrical resistance measurements of individual nanometer-wide Si fins
Folkersma, Steven; Bogdanowicz, Janusz; Schulze, Andreas; Petersen, D.H.; Hansen, O.; Henrichsen, H.; Nielsen, P.F.; Vandervorst, Wilfried (2017) -
Impact of Sn on Ga activation in heteroepitaxial Ge1-xSnx layer
Shimura, Y.; Nakatsuka, O.; Vincent, Benjamin; Gencarelli, Federica; Clarysse, Trudo; Vandervorst, Wilfried; Caymax, Matty; Loo, Roger; Jensen, A.; Petersen, D.H.; Zaima, S. (2012) -
Micro-uniformity during laser anneal: metrology and physics
Vandervorst, Wilfried; Rosseel, Erik; Lin, R.; Petersen, D.H.; Clarysse, Trudo; Goossens, Jozefien; Nielsen, P.F.; Churton, K. (2008) -
Mobility and carrier concentration measurements on nm-wide semiconductor fins
Witthoft, M.-L.; Folkersma, Steven; Bogdanowicz, Janusz; Marangoni, T.; Vohra, Anurag; Porret, Clément; Loo, Roger; Henrichsen, H.H.; Hansen, O.; Vandervorst, Wilfried; Petersen, D.H. (2018-06) -
On the activation mechanisms of sub-melt laser anneals
Clarysse, Trudo; Bogdanowicz, Janusz; Goossens, Jozefien; Moussa, Alain; Rosseel, Erik; Vandervorst, Wilfried; Petersen, D.H.; Lin, R.; Nielsen, P.F.; Hansen, O.; Defranoux, C.; Vertikov, A.; Gostein, M.; Bennett, N.S.; Cowern, N.E.B.; Faifer, V.N. (2008) -
Undoped and in-situ B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition
Vincent, Benjamin; Gencarelli, Federica; Bender, Hugo; Merckling, Clement; Douhard, Bastien; Petersen, D.H.; Hansen, O.; Henrichsen, H.H.; Meersschaut, Johan; Vandervorst, Wilfried; Heyns, Marc; Loo, Roger; Caymax, Matty (2011)