Browsing by author "Maslakov, K."
Now showing items 1-2 of 2
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Interaction of F atoms with SiCOH ultra low-k films. Part II: Etching
Rakhimova, T.; Lopaev, D.; Mankelevich, Y.; Kurchikov, K.; Zyryanov, S.; Palov, A.P.; Proshina, O.V.; Maslakov, K.; Baklanov, Mikhaïl (2015) -
Low-k protection from F radicals and VUV photons using a multilayer pore grafting approach
Zotovich, Alexey; Rezvanov, Askar; Chanson, Romain; Zhang, L.; Hacker, N.; Kurchikov, K.; Klimin, S.; Zyryanov, S. M.; Lopaev, Dimitri; Gornev, E.; Clemente, I.; Miakonkikh, A.; Maslakov, K. (2018)