Publication:
Interaction of F atoms with SiCOH ultra low-k films. Part II: Etching
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1939 since deposited on 2021-10-22
1last month
Acq. date: 2026-01-09
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Metrics
Views
1939 since deposited on 2021-10-22
1last month
Acq. date: 2026-01-09
Citations