Browsing by author "Solak, Harun H."
Now showing items 1-4 of 4
-
Characterization of extreme ultraviolet resists with interference lithography
Solak, Harun H.; Ekinci, Yasin; Gronheid, Roel; Jouve, Amandine (2005) -
EUV resist contrast loss determination using interference lithography
Langner, Andreas; Solak, Harun H.; Auzelyte, Vaida; Ekinci, Yasin; David, Christian; Gobrecht, Jens; Gronheid, Roel; van Setten, Eelco; van Ingen Schenau, Koen; Feenstra, Kees (2009) -
Measuring resist-induced contrast loss using EUV interference lithography
Langner, Andreas; Solak, Harun H.; Gronheid, Roel; van Setten, Eelco; Auzelyte, Vaida; Ekinci, Yasin; van Ingen Schenau, Koen; Feenstra, Kees (2010) -
Microstepper vs. interference EUV lithography: effects on resist profiles
Gronheid, Roel; Van Roey, Frieda; Goethals, Mieke; Solak, Harun H.; Ekinci, Yasin; van Ingen Schenau, Koen; Vannuffel, Cyril; Jouve, Amandine (2005)