Browsing by author "Bogaerts, A."
Now showing items 1-5 of 5
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Characterization of nano-crystalline diamond films grown under continuous DC bias during plasma enhanced chemical vapor deposition
Mortet, Vincent; Zhang, L.; Eckert, M.; Soltani, A.; D'Haen, Jan; Douhéret, O.; Moreau, Myriam; Osswald, Sebastian; Neyts, E.; Troadec, D.; Wagner, Patrick; Bogaerts, A.; Van Tendeloo, S.; Haenen, Ken (2010) -
Grain size tuning of nanocrystalline chemical vapor deposited diamond by continuous electrical bias growth: Experimental and theoretical study
Mortet, V.; Zhang, L.; Eckert, M.; D'Haen, Jan; Soltani, A.; Moreau, M.; Troadec, D.; Neyts, E.; de Jaeger, J.C.; Verbeeck, J.; Bogaerts, A.; Van Tendeloo, G.; Haenen, Ken; Wagner, Patrick (2012) -
Properties of diamond films grown by MWPECVD with DC substrate bias
Mortet, Vincent; Zhang, L.; Eckert, M.; D'Haen, Jan; Sotani, A.; Moreau, M.; Saitner, M.; Troadec, D.; Neyts, E.; de Jaeger, J.C.; Verbeeck, J.; Bogaerts, A.; Boyen, H.G.; Van Tendeloo, G.; Haenen, Ken; Wagner, Patrick (2010) -
Simultaneous etching and deposition processes during the etching of silicon with a Cl(2)/O(2)/Ar inductively coupled plasma
Tinck, Stefan; Bogaerts, A.; Shamiryan, Denis (2011) -
Theoretical investigation of grain size tuning during prolonged bias-enhanced nucleation
Eckert, M.; Mortet, Vincent; Zhang, L.A.; Neyts, E.; Verbeek, J.; Haenen, Ken; Bogaerts, A. (2011)