Browsing by imec author "2b1b9a40a5042a44aba1e9ff0f2fc7fa8aa8d32a"
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Additives in Cu plating for microelectronics applications
Radisic, Alex; Ross, Frances; Haesevoets, Karel; Struyf, Herbert; Vereecken, Philippe (2018) -
Atomic layer deposition of 2D transition metal dichalogenides
Delabie, Annelies; Caymax, Matty; Groven, Benjamin; Heyne, Markus; Haesevoets, Karel; Meersschaut, Johan; Nuytten, Thomas; Bender, Hugo; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Heyns, Marc; Barla, Kathy; Radu, Iuliana; Thean, Aaron (2015-10) -
Copper rich Cu1-xNix alloys (0.05 < x < 0.15) electrodeposited from acid sulfate-based electrolyte with benzotriazole additive for microbump metallization for 3D stacked integrated circuits
Haesevoets, Karel; Radisic, Alex; Vereecken, Philippe (2019) -
CuNi alloy electrodeposition for microbumps using benzotriazole
Haesevoets, Karel; Radisic, Alex; Vereecken, Philippe (2018) -
Electrochemical deposition seeding mechanisms of CuNi-alloys (for novel chip technologies)
Haesevoets, Karel; Vereecken, Philippe; Radisic, Alex (2016) -
Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: Impact of reducing agents
Delabie, Annelies; Caymax, Matty; Groven, Benjamin; Heyne, Markus; Haesevoets, Karel; Meersschaut, Johan; Nuytten, Thomas; Bender, Hugo; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; De Gendt, Stefan; Heyns, Marc; Barla, Kathy; Radu, Iuliana; Thean, Aaron (2015) -
Monolayer controlled deposition of 2D transition metal dichalcogenides on large area substrates
Delabie, Annelies; Groven, Benjamin; Heyne, Markus; Haesevoets, Karel; Meersschaut, Johan; Nuytten, Thomas; Verdonck, Patrick; Van Elshocht, Sven; Heyns, Marc; Caymax, Matty; Barla, Kathy; Radu, Iuliana; Thean, Aaron (2015) -
Plasma enhanced atomic layer deposition of two-dimensional WS2 from WF6, H2S and H2 plasma precursors
Groven, Benjamin; Heyne, Markus; Haesevoets, Karel; Meersschaut, Johan; Nuytten, Thomas; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Heyns, Marc; Radu, Iuliana; Delabie, Annelies; Caymax, Matty (2015) -
Reducing agents for the atomic layer deposition of WS2 from the WF6 and H2S precursors
Delabie, Annelies; Heyne, Markus; Groven, Benjamin; Haesevoets, Karel; Meersschaut, Johan; Nuytten, Thomas; Verdonck, Patrick; Van Elshocht, Sven; Heyns, Marc; Radu, Iuliana; Caymax, Matty (2015-07) -
The Role of Benzotriazole in Electrodeposition of Cu1-xNix Alloys (0.05 < x < 0.15) on Cu and Ni Substrates
Haesevoets, Karel; Philipsen, Harold; Vereecken, Philippe (2022-05-05)