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Reducing agents for the atomic layer deposition of WS2 from the WF6 and H2S precursors
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Authors
Delabie, Annelies
;
Heyne, Markus
;
Groven, Benjamin
;
Haesevoets, Karel
;
Meersschaut, Johan
;
Nuytten, Thomas
;
Verdonck, Patrick
;
Van Elshocht, Sven
;
Heyns, Marc
;
Radu, Iuliana
;
Caymax, Matty
Conference
15th International Conference on Atomic Layer Deposition - ALD
Title
Reducing agents for the atomic layer deposition of WS2 from the WF6 and H2S precursors
Publication type
Proceedings paper
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