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Plasma enhanced atomic layer deposition of two-dimensional WS2 from WF6, H2S and H2 plasma precursors
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Authors
Groven, Benjamin
;
Heyne, Markus
;
Haesevoets, Karel
;
Meersschaut, Johan
;
Nuytten, Thomas
;
Conard, Thierry
;
Verdonck, Patrick
;
Van Elshocht, Sven
;
Heyns, Marc
;
Radu, Iuliana
;
Delabie, Annelies
;
Caymax, Matty
Conference
15th International Conference on Atomic Layer Deposition - ALD
Title
Plasma enhanced atomic layer deposition of two-dimensional WS2 from WF6, H2S and H2 plasma precursors
Publication type
Proceedings paper
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