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Plasma enhanced atomic layer deposition of two-dimensional WS2 from WF6, H2S and H2 plasma precursors
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1887 since deposited on 2021-10-22
1last month
Acq. date: 2026-02-27
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Statistics
Views
1887 since deposited on 2021-10-22
1last month
Acq. date: 2026-02-27
Citations