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Plasma enhanced atomic layer deposition of two-dimensional WS2 from WF6, H2S and H2 plasma precursors
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1891 since deposited on 2021-10-22
2last month
Acq. date: 2026-08-24
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Statistics
Views
1891 since deposited on 2021-10-22
2last month
Acq. date: 2026-08-24
Citations