Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Plasma enhanced atomic layer deposition of two-dimensional WS2 from WF6, H2S and H2 plasma precursors
Publication:
Plasma enhanced atomic layer deposition of two-dimensional WS2 from WF6, H2S and H2 plasma precursors
Copy permalink
Date
2015
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Groven, Benjamin
;
Heyne, Markus
;
Haesevoets, Karel
;
Meersschaut, Johan
;
Nuytten, Thomas
;
Conard, Thierry
;
Verdonck, Patrick
;
Van Elshocht, Sven
;
Heyns, Marc
;
Radu, Iuliana
;
Delabie, Annelies
;
Caymax, Matty
Journal
Abstract
Description
Metrics
Views
1886
since deposited on 2021-10-22
Acq. date: 2025-12-16
Citations
Metrics
Views
1886
since deposited on 2021-10-22
Acq. date: 2025-12-16
Citations