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Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: Impact of reducing agents
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Authors
Delabie, Annelies
;
Caymax, Matty
;
Groven, Benjamin
;
Heyne, Markus
;
Haesevoets, Karel
;
Meersschaut, Johan
;
Nuytten, Thomas
;
Bender, Hugo
;
Conard, Thierry
;
Verdonck, Patrick
;
Van Elshocht, Sven
;
De Gendt, Stefan
;
Heyns, Marc
;
Barla, Kathy
;
Radu, Iuliana
;
Thean, Aaron
ISSN
1359-7345
Issue
86
Journal
Chemical Communications
Volume
51
Title
Low temperature deposition of 2D WS2 layers from WF6 and H2S precursors: Impact of reducing agents
Publication type
Journal article
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