Browsing by author "Ernur, Didem"
Now showing items 1-16 of 16
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Atomic layer deposited barriers for copper interconnects
Schuhmacher, Jorg; Martin Hoyas, Ana; Ernur, Didem; Tokei, Zsolt; Travaly, Youssef; Bruynseraede, Christophe; Satta, Alessandra; Whelan, Caroline; Shamiryan, Denis; Beyer, Gerald; Abell, Thomas; Sutcliffe, Victor; Schaekers, Marc; Maex, Karen (2004) -
Copper grain growth in reduced dimensions
Brongersma, Sywert; Vanstreels, Kris; Wu, W.; Zhang, Wenqi; Ernur, Didem; D'Haen, Jan; Terzieva, Valentina; Van Hove, Marleen; Clarysse, Trudo; Carbonell, Laure; Vandervorst, Wilfried; De Ceuninck, Ward; Maex, Karen (2004-06) -
Corrosion and inhibition of WNxCy barrier during chemical mechanical planarization
Ernur, Didem; Terzieva, Valentina; Schuhmacher, Jorg; Sutcliffe, Victor; Whelan, Caroline; Maex, Karen (2005) -
Corrosion of copper interconnects
Ernur, Didem (2005-01) -
Corrosion of narrow copper damascene interconnects
Ernur, Didem; Terzieva, Valentina; Wu, Wen; Brongersma, Sywert; Maex, Karen (2004) -
Corrosion of the copper damascene interconnects as a function of the electrochemical plating process parameters
Ernur, Didem; Wu, Wen; Brongersma, Sywert; Terzieva, Valentina; Maex, Karen (2004) -
Galvanic corrosion testing of WCxNy barrier metal in H202 based slurries
Ernur, Didem; Schuhmacher, Jörg; Terzieva, Valentina; Shamiryan, Denis; Maex, Karen (2003) -
Grain growth in copper interconnect lines
Wu, Wen; Ernur, Didem; Brongersma, Sywert; Van Hove, Marleen; Maex, Karen (2004) -
Influence of electrochemical plating process parameters on corrosion of Cu damascene interconnects
Ernur, Didem; Wu, Wen; Brongersma, Sywert; Terzieva, Valentina; Maex, Karen (2004) -
Influence of low-k dry etch chemistries on the properties of Copper and a TA-based diffusion barrier
Ernur, Didem; Iacopi, Francesca; Carbonell, Laure; Struyf, Herbert; Maex, Karen (2003) -
Inhibition of galvanic corrosion of WNC barrier metal for reliable Cu CMP
Ernur, Didem; Terzieva, Valentina; Schuhmacher, Jorg; Maex, Karen (2004) -
Investigation of barrier and slurry effects on the galvanic corrosion of copper
Ernur, Didem; Kondo, S.; Shamiryan, Denis; Maex, Karen (2002) -
Narrow trench corrosion
Ernur, Didem; Kondo, Seiichi; Maex, Karen (2001) -
Narrow trench corrosion
Ernur, Didem; Kondo, Seiichi; Maex, Karen (2002) -
Narrow trench corrosion of copper damascene interconnects
Ernur, Didem; Kondo, S.; Maex, Karen (2002) -
The impact of annealing on the corrosion mechanism of copper films
Ernur, Didem; Carbonell, Laure; Maex, Karen (2003)