Publication:

Atomic layer deposited barriers for copper interconnects

Date

2004
Meeting abstract
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Author(s)

Schuhmacher, Jorg
;
Martin Hoyas, Ana
;
Ernur, Didem  
;
Tokei, Zsolt  
;
Travaly, Youssef
;
Bruynseraede, Christophe
;
Satta, Alessandra
;
Whelan, Caroline
;
Shamiryan, Denis
;
Beyer, Gerald  
;
Abell, Thomas
;
Sutcliffe, Victor
;
Schaekers, Marc  
;
Maex, Karen  

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