Browsing by author "Hoshiko, Kenji"
Now showing items 1-6 of 6
-
Comparison of LFLE and LELE manufacturability
Miller, Andy; Maenhoudt, Mireille; Vangoidsenhoven, Diziana; Murdoch, Gayle; Shioya, Takeo; Hoshiko, Kenji (2008) -
Double patterning process with resist freezing technique
Hoshiko, Kenji; Shioya, Takeo; Fujiwara, Koichi; Yamaguchi, Yoshikazu; Shimokawa, Tsutomu; Maenhoudt, Mireille; Miller, Andy; Vangoidsenhoven, Diziana (2008) -
Full-wafer in-situ fabrication and packaging of microfluidic flow cytometer with photo-patternable adhesive polymers
de Wijs, Koen; Liu, Chengxun; Majeed, Bivragh; Jans, Karolien; O'Callaghan, John; Loo, Josine; Sohn, Erik; Peeters, Sara; Van Roosbroeck, Ruben; Miyazaki, Tomokazu; Hoshiko, Kenji; Nishimura, Isao; Hieda, Katsuhiko; Lagae, Liesbet (2018) -
Point-of-use filtration methods to reduce defectivity
Braggin, Jennifer; Schollaert, Wim; Hoshiko, Kenji; Buch, X. (2010) -
Roughness and variability in EUV lithography: Who is to blame? (Part 1)
Vaglio Pret, Alessandro; Gronheid, Roel; Younkin, Todd; Winroth, Gustaf; Biafore, John; Anno, Yusuke; Hoshiko, Kenji; Constantoudis, Vassilios (2013) -
XAS photoresists electron/quantum yields study with synchrotron light
De Schepper, Peter; Vaglio Pret, Alessandro; Hansen, Terje; Giglia, Angelo; Hoshiko, Kenji; Mani, Antonio; Biafore, John J. (2015)