Browsing by author "O'Neill, Anthony G."
Now showing items 1-4 of 4
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Demonstration of a submicron damascene Cu/low-k mechanical sensor to monitor stress in BEOL metallisation
Wilson, Chris; Croes, Kristof; Tokei, Zsolt; Beyer, Gerald; Horsfall, Horsfall; O'Neill, Anthony G. (2009) -
Direct measurement of MOSFET channel strain by means of backside etching and Raman spectroscopy on long-channel devices
Agaiby, Rouzet M. B.; Olsen, Sarah; Eneman, Geert; Simoen, Eddy; Augendre, Emmanuel; O'Neill, Anthony G. (2010) -
In situ X-ray diffraction study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/low-k damascene interconnects using synchrotron radiation
Wilson, Chris; Volders, Henny; Croes, Kristof; Pantouvaki, Marianna; Beyer, Gerald; Horsfall, Alton B.; O'Neill, Anthony G.; Tokei, Zsolt (2010) -
In-situ study of self-forming barriers from a Cu-Mn alloy in 100 nm Cu/Low-k damascene interconnects using synchrotron radiation
Wilson, Chris; Volders, Henny; Tokei, Zsolt; Croes, Kristof; Pantouvaki, Marianna; Beyer, Gerald; Horsfall, Alton B.; O'Neill, Anthony G. (2009)