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Direct measurement of MOSFET channel strain by means of backside etching and Raman spectroscopy on long-channel devices
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Authors
Agaiby, Rouzet M. B.
;
Olsen, Sarah
;
Eneman, Geert
;
Simoen, Eddy
;
Augendre, Emmanuel
;
O'Neill, Anthony G.
ISSN
0741-3106
Issue
5
Journal
IEEE Electron Device Letters
Volume
31
Title
Direct measurement of MOSFET channel strain by means of backside etching and Raman spectroscopy on long-channel devices
Publication type
Journal article
Embargo date
9999-12-31
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