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Direct measurement of MOSFET channel strain by means of backside etching and Raman spectroscopy on long-channel devices
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1922 since deposited on 2021-10-18
1last month
Acq. date: 2026-01-10
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1922 since deposited on 2021-10-18
1last month
Acq. date: 2026-01-10
Citations