Browsing by author "Wouters, Kristof"
Now showing items 1-4 of 4
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A comb based in-plane SiGe capacitive accelerometer for above-IC integration
Wen, Lianggong; Wouters, Kristof; Haspeslagh, Luc; Witvrouw, Ann; Puers, Bob (2010) -
An in-plane SiGe differential capacitive accelerometer for above-IC integration
Wen, Lianggong; Wouters, Kristof; Haspeslagh, Luc; Witvrouw, Ann; Puers, Bob (2011-07) -
Determination of mechanical and swelling properties of EPOCLAD negative photoresist
Wouters, Kristof; Vanstreels, Kris; Gijsenbergh, Pieter; Puers, Bob (2010) -
Determining physical properties of EpoClad negative photoresist for use in MEMS applications
Gijsenbergh, Pieter; Wouters, Kristof; Vanstreels, Kris; Puers, Robert (2011)