Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Determining physical properties of EpoClad negative photoresist for use in MEMS applications
Publication:
Determining physical properties of EpoClad negative photoresist for use in MEMS applications
Copy permalink
Date
2011
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Gijsenbergh, Pieter
;
Wouters, Kristof
;
Vanstreels, Kris
;
Puers, Robert
Journal
Journal of Micromechanics and Microengineering
Abstract
Description
Statistics
Views
1875
since deposited on 2021-10-19
1
last month
1
last week
Acq. date: 2026-10-08
Citations
Statistics
Views
1875
since deposited on 2021-10-19
1
last month
1
last week
Acq. date: 2026-10-08
Citations