Browsing by author "Wei, Chih-I"

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Better prediction on patterning failure mode with hotspot aware OPC modeling

Wei, Chih-I; Wu, Stewart; Deng, Yunfei; Khaira, Gurdaman; Kusnadi, I.; Fenger, G.; Kang, S.; Okamoto, Y.; Maruyama, K.; Yamaszaki, Y.; Das, Sayantan; Halder, Sandip; Gillijns, Werner; Lorusso, Gian (2021)
Low Landing Energy as an Enabler for Optimal Contour Based OPC Modeling in the EUV Era

Alkoken, Ran; Baram, Mor; Oron, Gadi; Schuch, Nivea; Robert, Frederic; Figueiro, Thiago; Brand, Omri; Geta, Matan; Saha, Kasturi; Miller, Elias; Zavhon, Tal; Tiwari, Dipayan; Singh, Deepakkumar; Sarkar, Sujan Kumar; Rincon Delgadillo, Paulina; Lorusso, Gian; Beral, Christophe; Wei, Chih-I; Curvacho, Gabriel; Kim, Young Chang; Fenger, Germain (2024)
Probability prediction of EUV process failure due to resist-exposure stochastic: applications of Gaussian random fields excursions and Rice's formula

Latypov, Azat; Khaira, Damon; Fenger, Germain; Sturtevant, John; Wei, Chih-I; De Bisschop, Peter (2020)