Browsing by author "Wei, Chih-I"
Now showing items 1-2 of 2
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Better prediction on patterning failure mode with hotspot aware OPC modeling
Wei, Chih-I; Wu, Stewart; Deng, Yunfei; Khaira, Gurdaman; Kusnadi, I.; Fenger, G.; Kang, S.; Okamoto, Y.; Maruyama, K.; Yamaszaki, Y.; Das, Sayantan; Halder, Sandip; Gillijns, Werner; Lorusso, Gian (2021) -
Probability prediction of EUV process failure due to resist-exposure stochastic: applications of Gaussian random fields excursions and Rice's formula
Latypov, Azat; Khaira, Damon; Fenger, Germain; Sturtevant, John; Wei, Chih-I; De Bisschop, Peter (2020)