Browsing by author "Guidotti, E."

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High aspect ratio via metallization for 3D integration using CVD TiN barrier and electrografted Cu seed

Druais, Gael; Dilliway, Gabriela; Fischer, P.; Guidotti, E.; Bureau, C.; Palmans, Roger; Radisic, Alex (2008)
High aspect ratio via metallization for 3D integration using CVD TiN barrier and electrografted Cu seed

Druais, Gael; Dilliway, G.; Fischer, P.; Guidotti, E.; Luhn, Ole; Radisic, Alex; Zahraoui, S. (2008)