Browsing by author "Mardani, Shabnam"
Now showing items 1-3 of 3
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Impact of UV cure time and wavelength on chemical, mechanical and electrical properties of PECVD deposited porous ultra low-k films
Godavarthi, Srinivas; Le, Quoc Toan; Verdonck, Patrick; Mardani, Shabnam; Vanstreels, Kris; Van Besien, Els; Baklanov, Mikhaïl (2012-03) -
Impact of wavelength of UV light and UV cure time on chemical and mechanical properties of PECVD deposited porous ultra low-k films
Godavarthi, Srinivas; Le, Quoc Toan; Verdonck, Patrick; Mardani, Shabnam; Vanstreels, Kris; Van Besien, Els; Baklanov, Mikhaïl (2013) -
Influence of varying porogen loads and different UV cures on low-k film characteristics
Farrel, Leo; Verdonck, Patrick; Van Besien, Els; Ciofi, Ivan; Borrello, Gianpaolo; Vanstreels, Kris; Mardani, Shabnam; Baklanov, Mikhaïl (2011)