Authors

Godavarthi, Srinivas; Le, Quoc Toan; Verdonck, Patrick; Mardani, Shabnam; Vanstreels, Kris; Van Besien, Els; Baklanov, Mikhaïl

Conference

Materials for Advanced Characterization - MAM

Title

Impact of UV cure time and wavelength on chemical, mechanical and electrical properties of PECVD deposited porous ultra low-k films

Publication type

Meeting abstract

Embargo date

9999-12-31