Publication:
Impact of UV cure time and wavelength on chemical, mechanical and electrical properties of PECVD deposited porous ultra low-k films
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1840 since deposited on 2021-10-20
1last month
Acq. date: 2026-01-27
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Views
1840 since deposited on 2021-10-20
1last month
Acq. date: 2026-01-27
Citations