Browsing by author "Efremov, A. A."
Now showing items 1-5 of 5
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Carbon enhancement of SiO2 nucleation in buried oxide synthesis
Efremov, A. A.; Litovchenko, V. G.; Romanova, G. P.; Sarikov, A. V.; Claeys, C. (2001) -
Gettering and stimulating factors on the formation of SIMOX structures with thin dielectric layer: experiment and modelling
Romanyuk, B. N.; Litovchenko, V. G.; Efremov, A. A.; Mel'nik, V. P.; Claeys, C. (1998) -
Processes in ultrthin buried oxide synthesis stimulated by low dose ion implantation
Litovchenko, V. G.; Efremov, A. A.; Romanyuk, B. N.; Mel'nik, V. P.; Claeys, Cor (1998) -
Stimulated buried dielectric phase formation for nanelectronic aims
Litovchenko, V. G.; Romanyuk, B. N.; Efremov, A. A.; Mel'nik, V. P.; Claeys, Cor (1997) -
Use of gettering and defect induced processes in ultra-thin buried oxide synthesis
Litovchenko, V. G.; Efremov, A. A.; Romanuk, B. N.; Mel'nik, V. P.; Claeys, Cor (1997)