Browsing by author "Barnes, Levi"
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Double patterning OPC and design for 22nm to 16nm device nodes
Lucas, Kevin; Cork, Chris; Miloslavsky, Alex; Luk-Pat, Gerry; Li, Xiaohai; Barnes, Levi; Gao, Weimin; Wiaux, Vincent (2009) -
Interactions of double patterning technology with wafer processing, OPC and design flows
Lucas, Kevin; Cork, Chris; Miloslavsky, Alex; Luk-Pat, Gerry; Barnes, Levi; Hapli, John; Lewellen, John; Rollins, Greg; Wiaux, Vincent; Verhaegen, Staf (2008)