Browsing by author "Liang, Andrew"

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Evolution of roughness during the pattern transfer of high-chi, 10 nm half-pitch, silicon-containing block copolymer structures

Blachut, Gregory; Sirard, Stephen; Liang, Andrew; Mack, Chris; Maher, Michael; Rincon Delgadillo, Paulina; Chan, BT; Mannaert, Geert; Vandenberghe, Geert; Willson, Grant; Ellison, Christopher; Hymes, Diane (2018)
Integrated approach to improving local CD uniformity in EUV patterning

Liang, Andrew; Hermans, Jan; Tran, Tim; Viatkina, Katja; Liang, Chen-Wei; Ward, Brandon; Chuang, Steven; Yu, Jengyi; Harm, Greg; Vandereyken, Jelle; Rio, David; Kubis, Michael; Tan, Samantha; Wise, Rich; Dusa, Mircea; Reddy, Sirish; Singhal, Akhil; Van Schravendijk, Bart; Dixit, Girish; Shamma, Nader (2017)