Browsing by author "Ono, Yukiharu"
Now showing items 1-3 of 3
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Advanced organic polymers for the aggressive scaling of low-k materials
Pantouvaki, Marianna; Zhao, Larry; Huffman, Craig; Heylen, Nancy; Ono, Yukiharu; Nakajima, Michio; Nakatani, Koji; Beyer, Gerald; Baklanov, Mikhaïl (2010) -
Effect of bake/cure temperature of an advanced organic ultra low-k material on the interface adhesion strength to metal barriers
Vanstreels, Kris; Pantouvaki, Marianna; Ferchichi, Abdelkarim; Verdonck, Patrick; Conard, Thierry; Ono, Yukiharu; Matsutani, Mihoko; Nakatani, Koji; Baklanov, Mikhaïl (2011) -
Ultra low-k materials based on self-assembled organic polymers
Pantouvaki, Marianna; Zhao, Larry; Huffman, Craig; Vanstreels, Kris; Verdonck, Patrick; Ono, Yukiharu; Nakajima, Michio; Nakatani, Koji; Beyer, Gerald; Baklanov, Mikhaïl (2011)