Browsing by author "Hong, Sung Eun"
Now showing items 1-7 of 7
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Capture probability of assembly defects in 14 nm half-pitch line/space DSA patterns
Pathangi Sriraman, Hari; Chan, BT; Van Look, Lieve; Vandenbroeck, Nadia; Van Den Heuvel, Dieter; Cross, Andrew; Hong, Sung Eun; Nafus, Kathleen; D'Urzo, Lucia; Gronheid, Roel (2015) -
Dielectric properties of spin-on metal oxides and their applications for 2D semiconductor devices
Sayan, Safak; Lin, Dennis; Asselberghs, Inge; Chiappe, Daniele; Sutar, Surajit; Radu, Iuliana; Thean, Aaron; Petermann, Claire; Hong, Sung Eun (2016) -
DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec
Pathangi Sriraman, Hari; Vaid, Varun; Chan, BT; Vandenbroeck, Nadia; Li, Jin; Hong, Sung Eun; Cao, Yi; Durairaj, Baskaran; Lin, Guanyang; Somervell, Mark; Kitano, Takahiro; Harukawa, Ryota; Sah, Kaushik; Cross, Andrew; Bayana, Hareen; D'Urzo, Lucia; Gronheid, Roel (2016) -
Implementation of surface energy modification in graphoepitaxy directed self-assembly for hole multiplication
Doise, Jan; Bekaert, Joost; Chan, BT; Gronheid, Roel; Cao, Yi; Hong, Sung Eun; Lin, Guanyang; Fishman, Daniel; Chakk, Yuli; Marzook, Taisir (2015) -
Influence of template fill in grapho-epitaxy DSA
Doise, Jan; Bekaert, Joost; Chan, BT; Hong, Sung Eun; Lin, Guanyang; Gronheid, Roel (2016) -
Influence of template fill in graphoepitaxy directed self-assembly
Doise, Jan; Bekaert, Joost; Chan, BT; Hong, Sung Eun; Lin, Guanyang; Gronheid, Roel (2016) -
Towards cost-effective and low defectivity DSA flows for line/space patterning
Pathangi Sriraman, Hari; Mallik, Arindam; Chan, BT; Vaid, Varun; Vandenbroeck, Nadia; Li, Jin; Hong, Sung Eun; Gronheid, Roel (2015)