Influence of template fill in graphoepitaxy directed self-assembly

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Authors

Doise, Jan; Bekaert, Joost; Chan, BT; Hong, Sung Eun; Lin, Guanyang; Gronheid, Roel

ISSN

1932-5150

Issue

3

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

15

Title

Influence of template fill in graphoepitaxy directed self-assembly

Publication type

Journal article

Embargo date

9999-12-31

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