Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Influence of template fill in graphoepitaxy directed self-assembly
Publication:
Influence of template fill in graphoepitaxy directed self-assembly
Date
2016
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
34652.pdf
3.06 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Doise, Jan
;
Bekaert, Joost
;
Chan, BT
;
Hong, Sung Eun
;
Lin, Guanyang
;
Gronheid, Roel
Journal
Journal of Micro/Nanolithography MEMS and MOEMS
Abstract
Description
Metrics
Views
1934
since deposited on 2021-10-23
402
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1934
since deposited on 2021-10-23
402
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations